“Spiral COSAMI” — A Multi-Undulator Compact Source for Actinic Mask Inspection in the extreme ultraviolet range

Abstract

A compact electron storage ring provides a bright, stable and reliable source of extreme ultraviolet (EUV) radiation for metrology applications in semiconductor industry. The COSAMI concept (COmpact Synchrotron for Actinic Mass Inspection) applied design principles and technology of modern diffraction limited light source storage rings to an EUV facility operating at 13.5 nm wavelength. Since floor space is an important issue in an industrial environment, we propose a lattice configuration where three (or more) recirculation turns are stacked vertically. We present a facility, called Spiral-COSAMI, which simultaneously serves multiple (three or more) EUV beamlines within about the same floor space of the original COSAMI, and using the same type of injector and the same set of diagnostics, radio-frequency and pulsed magnet devices. The increased period of revolution of the multiple turns mitigates the problem of ion trapping and relaxes specifications of injection kickers.