Abstract
Spectroscopic analysis of the laser beam induced current (LBIC) has been carried out as a powerful tool for characterizations of spacial homogeneity and surface and junction interfaces in amorphous silicon (a-Si) solar cells. We have found the photocurrent inhomogeneity of a-Si solar cells and analyzed the origins of the fluctuation using the spectroscopic LBIC measurement. There are three kinds of fluctuation patterns, i.e., spikes based on the dust and scratch of the film, aligned sinusoidal fluctuation with short period upon the glass substrate thickness inhomogeneity, and relatively long period oscillation based on the a-Si junction interface situation. It has also been revealed that a spectroscopic technique varing the wavelength of probe light makes it possible to know the in-depth profile of opto-electronic properties as well as optical properties of semiconductor devices.
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