Spectroscopic ellipsometry-based study of optical properties of amorphous and crystalline ZnSnO alloys and Zn2SnO4 thin films grown using sputtering deposition: Dielectric function and subgap states

Abstract

We investigated the optical properties of amorphous and crystalline zinc tin oxide (ZTO) thin films grown on SiO2/Si substrates with varying compositions via a co-sputtering deposition method at room temperature. The co-sputtering targets consist of SnO2 and ZnO. By varying the relative power ratio of the two targets, we demonstrate the ability to control the Sn and Zn composition of the resulting ZTO thin films. The ratio of [Sn]/([Sn] + [Zn]) atomic compositions was estimated at 11%, 29%, 42%, 54%, and 60%. Using a 600 °C annealing process, the as-grown amorphous ZTO films were transformed into crystalline ZTO films. The dielectric functions were obtained based on the measured ellipsometric angles, ψ and Δ. We determined the dielectric functions, absorption coefficients, and optical gap energies of ZTO thin films with varying compositions. The dielectric functions, absorption coefficients, and optical gap energies of amorphous and crystalline Zn2SnO4 thin films were obtained at 29 at. % of Sn. Subgap states at 1.6 eV (A) and 2.8 eV (B) of ZnSnO alloys and Zn2SnO4 films were found in the imaginary part of the dielectric function spectra. The subgap state intensities were reduced via a nitrogen gas annealing. Possible origins of the observed subgap states will be discussed.