Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)

Abstract

Spectroscopic ellipsometry (SE) measurements were made on thin-film and single-crystal TiO2 anatase using a two-modulator generalized ellipsometer. The TiO2 films were epitaxially stabilized on a LaAlO3 substrate in the anatase crystal structure using reactive sputter deposition. The films were highly crystalline, possessing a “stepped surface” morphology indicative of atomic layer-by-layer growth. The SE results for the anatase film indicate that the material is essentially oriented with the c axis perpendicular to the substrate, but there is some anisotropy near the interface and the surface. Corrugations of the film surface, as observed using atomic force microscopy, are consistent with a surface structure needed to create cross polarization. Accurate values of the optical functions of crystalline anatase were obtained above and below the band edge using SE. Above the band edge, both the ordinary and extraordinary complex dielectric functions exhibited two critical points.