Abstract
A diagnostic complex based on a magnetron sputtering device is proposed for studying a magnetron discharge plasma parameter by optical emission spectroscopy, using two spectroscopic systems: photographic and photoelectric. Software for digital processing of the obtained emission spectra is developed. The results obtained by the two spectroscopic systems are compared.
Highlights
The great interest in studying of the magnetron discharge (MD) physics is due to its widely used for the formation of different kinds of film coatings [1] used in a variety of industry branches e.g. in microelectronic, cutting tools or reflecting layers manufacture [2]
The resulting image of the radiation spectrum of the excited MD plasma particles is stored in electronic form in the *.jpg format, which in the future allows you to create a database of optical spectra of various chemical elements under different experimental conditions
A diagnostic complex based on a magnetron sputtering device (MSD) for studying MD plasma by using two radiation detection systems and digital processing of the obtained emission spectra is proposed
Summary
The great interest in studying of the magnetron discharge (MD) physics is due to its widely used for the formation of different kinds of film coatings [1] used in a variety of industry branches e.g. in microelectronic, cutting tools or reflecting layers manufacture [2]. It includes a magnetron sputtering device (MSD), photographic (F) and photoelectric (FE) plasma radiation detection systems. In the first case (F), the optical spectrum of the MD plasma is registered in a wide range of wavelengths, and the intensity of the spectral line along its height (h) represents the distribution of excited particles along the studied direction l. This is very relevant for a MD, since a magnetic field significantly affects the dependence of the plasma composition and its parameters on the axial coordinate. The use of two optical radiation detection systems allows obtaining information on the spatial-time characteristics of MD plasma
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