Abstract
This study shows the effects of copper material electrode, applied voltage, and different pressure values on electrical discharge plasma. The purpose of the work is the application of the spectral analysis method to obtain accurate results of nitrogen plasma parameters. By using the optical emission spectroscopy (OES), many N2 molecular spectra peaks appeared in the range from 300 to 480 nm. Also, some additional peaks were recorded, corresponding to atomic and ionic lines for nitrogen, target material, and hydrogen, in all samples. The electron density (ne) was calculated from the measurement of Stark broadening effect, which was found to decrease with increasing pressure from 0.1 mbar to 0.8 mbar. The higher emission intensities occurred at 0.2 mbar working pressure and were reduced with higher pressure. The vibrational temperature (Tvib) for N2 increased from 0.17 to 0.33 eV with increasing the pressure from 0.15 mbar to 0.2 mbar, then decreased to 0.25 eV with increasing the pressure to 0.8 mbar. Other plasma parameters were studied, which are electron temperature (Te), plasma frequency of electron ( ), and Debye length (λD).
Highlights
Glow discharge plasma is a region of relatively low temperature gas that is sustained in an ionized state by energetic electrons
The nitrogen plasma is generated for DC glow discharge system at different pressure and applied voltage values [7, 8]
The electron temperature decreases with increasing pressure from 0.15 to 0.4 mbar due to increasing the energy transfer from electrons to atoms by excitation and ionization collision, increases as a result of decreasing the energy delivered to electrons
Summary
Glow discharge plasma is a region of relatively low temperature gas that is sustained in an ionized state by energetic electrons. The most commonly used method for the generation and sustainability of low temperature plasma for various technical applications is applying the electric field to neutral gases [1]. The purpose of optical emission spectroscopy is to obtain as much information as possible, such as electron temperature (Te) and electron density (ne) within the limits of the plasma emission spectra in the optical range. It is a well-established non-invasive diagnostic technique with all necessary devices placed outside the system chamber, with proven cost and value effectiveness in basic and applied sciences [2, 3]. The diagnostic tools used involve Langmuir probe and optical spectroscopy [9, 10]
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