Abstract
We have fabricated diffraction gratings of parylene by evaporation polymerization. The parylene film was deposited onto a commercially available diffraction grating used as a template and transfer-printed onto a substrate. A well-defined periodic structure was replicated on the parylene film surface and its period was in good agreement with that of the template. For future light-emitting device application, we laminated a parylene grating with organic semiconductor crystals and investigated their emission properties under weak ultraviolet light excitation. We observed emissions parallel to the grating wave vector. Their spectra narrowed as peaks with full-widths at half-maxima less than 5 nm. We discussed these narrow emission lines considering them as the propagating light in a waveguide composed of the organic crystal and parylene grating. The present results reflect the formation of a high-quality optical cavity on a parylene film.
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