Specimen Preparation Considerations for 2D Dopant Profile Determination in Semiconductor Devices by Electron Holography

Abstract

Journal Article Specimen Preparation Considerations for 2D Dopant Profile Determination in Semiconductor Devices by Electron Holography Get access Kil-Soo Ko, Kil-Soo Ko Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712 Search for other works by this author on: Oxford Academic Google Scholar Ji-Ping Zhou, Ji-Ping Zhou Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712 Search for other works by this author on: Oxford Academic Google Scholar Lew Rabenberg Lew Rabenberg Texas Materials Institute, The University of Texas at Austin, Austin, TX 78712 Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 9, Issue S02, 1 August 2003, Pages 812–813, https://doi.org/10.1017/S1431927603444061 Published: 24 July 2003