Specific Heat Capacity Measurement of Single-Crystalline Silicon as New Reference Material

Abstract

We started to develop a new certified reference material for specific heat capacity measurement using a new type of cryogenic adiabatic calorimeter, applying a pulse-tube cryocooler in the temperature range from 50 to 350 K. A candidate certified reference material is single-crystalline silicon. To check the performance of the equipment, we measured the specific heat capacity of NIST SRM720, a type of synthetic sapphire. The relative expanded uncertainty of the measurement was estimated to be 0.65% at 350 K and 8.2% at 50 K, and the certified value of SRM720 was within the limits of uncertainty. In the next step, we measured the temperature dependence of the specific heat capacity of single-crystalline silicon. The result was compared with some reference data, and good agreement within 0.6% residual was found.