Specific features in the generation and motion of dislocations in heat-treated silicon wafers

Abstract

The specific features in the generation and motion of dislocations in silicon single-crystal wafers after different heat treatments are investigated by the four-point bending technique. It is demonstrated that annealing of silicon single-crystal wafers at a temperature of 450°C leads to their substantial hardening as compared to the postgrowth state. The oxygen-containing precipitates and precipitate dislocation pileups formed in the silicon wafer bulk during multistage heat treatment are efficient heterogeneous nucleation sites of dislocations under the action of thermal or mechanical stresses. It is found that the multistage heat treatment of the silicon wafers under conditions providing the formation of an internal getter within their bulk results in considerable disordering of the wafer structure. The inference is made that the formation of the defect state in the crystal lattice of silicon and the strength characteristics of silicon wafers substantially depend on the temperature-time schedules of the low-temperature stage of multistage heat treatment.