Abstract
A transmission-line type model is developed for the four-point-probe measurement of multilayered structures. It is shown that the specific contact resistance between two layers can be extracted from this type of measurement without incurring the problem of non-ideal contact-pad geometries usually encountered in contact resistance problems. This method can be visualized as a probing of the potential distribution on an infinite contact pad. Experimental verification of the model is conducted on as-deposited SiO 2/Al/RuO 2/Al structures. Excellent agreement is found between theory and experiment. A value of 6 × 10 −5 Ωcm 2 to within a factor of two is obtained for the as-deposited specific contact resistance between Al and RuO 2.
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