Spatial resolution in X-ray photoelectron spectroscopy

Abstract

Restricted accessMoreSectionsView PDF ToolsAdd to favoritesDownload CitationsTrack Citations ShareShare onFacebookTwitterLinked InRedditEmail Cite this article Drummond I. W. 1996Spatial resolution in X-ray photoelectron spectroscopyPhil. Trans. R. Soc. A.3542667–2682http://doi.org/10.1098/rsta.1996.0122SectionRestricted accessArticleSpatial resolution in X-ray photoelectron spectroscopy I. W. Drummond Google Scholar Find this author on PubMed Search for more papers by this author I. W. Drummond Google Scholar Find this author on PubMed Search for more papers by this author Published:15 November 1996https://doi.org/10.1098/rsta.1996.0122AbstractX-ray photoelectron spectroscopy (XPS) is a well established surface analytical technique capable of giving elemental and chemical state information for nearly all elements. Recent improvements in the sensitivity of the method have made spatially resolved XPS a viable technique with, at present, a resolution of 5-30 μm in commercial instrumentation. The different methods are described and their application to semiconductor devices and materials is outlined with reference to spatial resolution and information in depth. Future prospects for imaging XPS are briefly discussed.FootnotesThis text was harvested from a scanned image of the original document using optical character recognition (OCR) software. As such, it may contain errors. Please contact the Royal Society if you find an error you would like to see corrected. Mathematical notations produced through Infty OCR. Previous ArticleNext Article VIEW FULL TEXT DOWNLOAD PDF FiguresRelatedReferencesDetailsCited by Kersell H, Falling L, Shavorskiy A and Nemšák S (2021) Some Future Perspectives in Ambient Pressure X-ray Spectroscopies: Atmospheric Pressure, Spatially Resolved and Multi-modal Experiments Ambient Pressure Spectroscopy in Complex Chemical Environments, 10.1021/bk-2021-1396.ch014, (333-358) Nguyen L, Tao P, Liu H, Al-Hada M, Amati M, Sezen H, Tang Y, Gregoratti L and Tao F (2018) Studies of surface of metal nanoparticles in a flowing liquid with XPS, Chemical Communications, 10.1039/C8CC03497D, 54:71, (9981-9984) Scheithauer U, Kolb M, Kip G, Naburgh E and Snijders J (2016) Round robin: Quantitative lateral resolution of PHI XPS microprobes Quantum 2000/Quantera SXM, Journal of Electron Spectroscopy and Related Phenomena, 10.1016/j.elspec.2016.04.007, 210, (13-15), Online publication date: 1-Jul-2016. Béchu S, Richard-Plouet M, Fernandez V, Walton J and Fairley N (2016) Developments in numerical treatments for large data sets of XPS images, Surface and Interface Analysis, 10.1002/sia.5970, 48:5, (301-309), Online publication date: 1-May-2016. Scheithauer U (2014) Characterization of the primary X-ray source of an XPS microprobe Quantum 2000, Journal of Electron Spectroscopy and Related Phenomena, 10.1016/j.elspec.2014.03.009, 193, (58-62), Online publication date: 1-Mar-2014. Wolstenholme J (2008) Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006-Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, Surface and Interface Analysis, 10.1002/sia.2771, 40:5, (966-968), Online publication date: 1-May-2008. Blomfield C (2005) Spatially resolved X-ray photoelectron spectroscopy, Journal of Electron Spectroscopy and Related Phenomena, 10.1016/j.elspec.2004.09.026, 143:2-3, (241-249), Online publication date: 1-May-2005. Vancso G, Hillborg H and Schönherr H (2005) Chemical Composition of Polymer Surfaces Imaged by Atomic Force Microscopyand Complementary Approaches Polymer Analysis Polymer Theory, 10.1007/b135560, (55-129), . Kibel M (2003) X-Ray Photoelectron Spectroscopy Surface Analysis Methods in Materials Science, 10.1007/978-3-662-05227-3_7, (175-201), . This Issue15 November 1996Volume 354Issue 1719 Article InformationDOI:https://doi.org/10.1098/rsta.1996.0122Published by:Royal SocietyPrint ISSN:1364-503XOnline ISSN:1471-2962History: Published online01/01/1997Published in print15/11/1996 License:Scanned images copyright © 2017, Royal Society Citations and impact