Abstract
Focused beam shaping is very effective in material laser processing, optical tweezers, and laser microscopy. In particular, size minimization of shaped beams has attracted much attention because it is directly connected to the performance in these applications. In this paper, we demonstrated spatial phase shaping of ultrashort laser pulses to overcome the diffraction limit. In the experiment, it was found that the beam diameter of the sub-diffraction-limit spot was 0.60-times smaller than the diffraction-limit spot. To verify the effectiveness of the proposed method, a sub-diffraction-limit spot was applied to femtosecond laser processing. The diameter of the structure processed by the sub-diffraction-limit spot was reduced to 0.39-times thanks to the nonlinearity of femtosecond laser processing. Furthermore, as the possibility to generate other beam shapes, light patterns formed with combinations of connected and unconnected spots were also demonstrated by the method.
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