Spatial ordering of self-organized InGaAs/AlGaAs quantum disks on GaAs (311)B substrates

Abstract

We report the control of self-organization of InxGa1−xAs/AlGaAs quantum disks on GaAs (311)B surfaces using a novel technique based upon lithography-defined SiN dot arrays. A strained InGaAs island array selectively grown using the SiN dots provides periodic strain field. When the pitch of lateral ordering corresponds with the period of the strain field, self-organized quantum disks stacked on the InGaAs islands are precisely arranged just as the buried SiN dot array. The spacing of the array element is 250–300 nm (x = 0.3) and around 150 nm (x = 0.4). Vertical alignment by strain is achieved at a very thick (95 nm) separating layer. Characterization using atomic force microscopy reveals the size-fluctuation of disk is dramatically improved with spatial ordering.