Abstract

To address the essential problem in surface metrology of establishing functional correlations spatial, frequencies in topographic measurements are progressively decomposed into a large number of narrow bands. Bandpass filters and commercially available software are used. These bands can be analyzed with conventional surface texture parameters, like average roughness, Sa, or other parameters, for detailed, multiscale topographic characterizations. Earlier kinds of multiscale characterization, like relative area, required specialized software performing multiple triangular tiling exercises. Multiscale regression analyses can test strengths of functional correlations over a range of scales. Here, friction coefficients are regressed against standard surface texture parameters over the range of scales available in a measurement. Correlation strengths trend with the scales of the bandpass filters. Using bandpass frequency, i.e., wavelength or scale, decompositions, the R2 at 25 μm, exceeds 0.9 for Sa compared with an R2 of only 0.2 using the broader band of conventional roughness filtering. These improved, scale-specific functional correlations can facilitate scientific understandings and specifications of topographies in product and process design and in designs of quality assurance systems.

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