Spatial evolution of an ion beam created by a geometrically expanding low-pressure argon plasma

Abstract

The spatial distribution of an ion beam—created at the interface of a small diameter plasma source and much larger diameter diffusion chamber—is studied in a low-pressure inductively coupled plasma using a retarding field energy analyzer. It is found that the ion beam density decays axially and radially in the diffusion chamber following the expansion of the plasma from the source region. The radial distribution of the ion beam indicates that the acceleration region has a convex shape and is located just outside the source exit, giving rise to a hemispherical plasma expansion into the diffusion chamber.