Spatial distribution of the velocity distribution function of Fe atoms in a magnetron sputtering plasma source

Abstract

We examined the spatial distribution of the velocity distribution function of Fe atoms in a conventional dc magnetron sputtering source by laser-induced fluorescence (LIF) imaging spectroscopy. By measuring the Doppler broadening of the excitation spectrum of LIF, we evaluated the velocity distribution function of Fe at many positions in the discharge space. By calculating the first- and second-order moments of the velocity distribution function, we obtained two-dimensional maps of the average velocity and the effective temperature in the r-z plane of the cylindrically symmetric magnetron discharge. The map of the average velocity clearly indicates that Fe atoms have fast velocity in the region adjacent to the target at a low discharge pressure such as 3 mTorr, while at a high gas pressure such as 20 mTorr, the average velocity of Fe atoms is almost zero in the entire discharge space. On the other hand, it has been found from the map of the effective temperature that the velocity distribution function observed at 3 mTorr has a broad width corresponding to approximately 8×104K in the bright plasma near the target.