Abstract
In this paper, we show that the interface state density in the middle of the channel obtained by charge pumping measurements on small size MOS transistors are always over-estimated, because of the actual non uniform spatial distribution along the Si-SiO 2 interface. It appears to be necessary to take into account the local densities of surface states before degradation, when the charge pumping technique is used to analyse the rate of creation of new interface states in MOS transistors subjected to aging stresses. A new calculation method has been proposed which allowd the determination of surface state density in the vicinity of the drain after channel hot carrier injection.
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