Abstract
We have developed a measurement method for obtaining spatial distributions of absolute densities of CF and CF2 radicals in a plasma reactor by combining single-path infrared laser absorption spectroscopy (IRLAS) and laser-induced fluorescence (LIF) techniques. This novel method has been successfully applied to the spatial distribution measurement of absolute densities of CF and CF2 radicals in an electron cyclotron resonance (ECR) plasma reactor employing a tetrafluorocarbon gas (C4F8). It was found that CF radical densities were higher than CF2 ones in the plasma region but lower outside the plasma region.
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