Space Charge Measurement Equipment Which Has Sub-micron Resolution by Laser Induced Pressure Pulse Method.

Abstract

The laser induced pressure pulse (LIPP) method has the advantage of higher resolution in the depth direction than other methods. However, in this method, it is demerits that induction noise in laser system is large and measurement signal is low reliability. Therefore, we have developed a new LIPP measurement system using pulse laser of low-density energy, shield technique and deconvolution processing. This system can observe the space charge profile with high reliability. Furthermore, we introduce the new LIPP system, which has sub-micron resolution of 0.6 microns.