Abstract
Hot filament and microwave plasma CVD micro- nanocrystalline diamond films are analysed by visible and ultra-violet excitation source Raman spectroscopy. The sample grain size varies from 20 nm to 2 μm. The hydrogen concentration in samples is measured by SIMS and compared to the grain size, and to the ratio of sp 2 carbon bonds determined by Raman spectroscopy from the 1332 cm − 1 diamond peak and the sp 2 1550 cm − 1 G band. Hydrogen concentration appears to be proportional to the sp 2 bonds ratio. The 3000 cm − 1 CH x stretching mode band intensity observed on the Raman spectra is decreasing with the G band intensity. Thermal annealing modifies the sp 2 phase structure and concentration, as hydrogen outdiffuses.
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