Abstract
Abstract Nanocrystalline diamond (NCD) films were synthesized using microwave plasma chemical vapor deposition procedure with the CH4/Ar/H2 gas mixture on silicon substrate at moderate temperatures in the present study. The characteristics of NCD films were evaluated using scanning electron microscopy, Raman spectroscopy, transmission electron microscopy, optical emission spectroscopy and optical contact angle meter. The analytical results revealed that C2 radial was the dominant species in the deposited process. From TEM observation the NCD films was formed via the etching of hydrocarbons and a small amount of hydrogen content additive into gas mixture could improve the aggregation of the nucleation film to form the NCD films. A (crystalline → amorphous-like → nanocrystalline structure) transition occurred during formation of NCD films. The more hydrophobic surfaces implied that NCD films were the potential biomaterial in the application of article heart valve or stent.
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