Abstract
It is demonstrated that the operating range of a liquid nitrogen-chilled synthetic zeolite sorption pump can be extended into the high and ultra-high vacuum regions, without sarificing system cleanliness, by pre-evacuating the system prior to cooling the zeolite through a sorption pump of new design. Pressures as low as 5 × 10−11 torr were produced in a small system by sorption pumping with liquid nitrogen-chilled Linde 13X molecular sieve (a synthetic zeolite) after pre-evacuation of the system by a small oil diffusion pump. The design of this new type of sorption pump, its operating characteristics, and its application in ion-getter-pumped vacuum systems are briefly discussed.
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