Abstract
Sputter-ion pumped vacuum systems are commonly roughed with sorption pumps. This paper describes the design and performance of a new pump that is tailored for use with small systems. The new pump is designed to maximize heat transfer between the liquid-nitrogen coolant and the Molecular Sieve by means of an aluminum pump housing and by providing internal aluminum rods welded to the bottom of the housing. The performance of the new pump was assessed by three series of tests on a small (4.65-liter) vacuum system. These tests showed that the pump performs satisfactorily without internal gas access screens or prechilling, and that it can repeatedly (>20 times) evacuate the test system without loss of maximum (1×10−2 Torr in 7.5 min and 1×10−3 Torr in 40 min) performance.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
