Abstract
The charge state distribution of ions produced in a vacuum arc plasma has been investigated for cathode materials Ti, Sn, and Pt as a function of arc current and magnetic field strength in which the arc is located. A vacuum arc ion source was used in combination with a time-of-flight charge state diagnostic. It was found that the arc impedance and the ion charge states increase substantially with magnetic field strength. While there was effectively no variation of charge state distribution with arc current for the case of zero applied field, there was a significant increase in the charge states with arc current when the applied magnetic field was 1 kG.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
