Abstract
Ion charge state distributions of vacuum arc plasma have been investigated using a time of flight method. It was found that the fraction of high charge components increased using an external strong magnetic field and high arc current. Compared with conventional low current arc parameters (zero magnetic field, arc current less then 300 A) in the parameters range investigated (magnetic field up to 10 kG, arc current up to 4 kA) the mean ion charge state increased by a factor 1.2-2.5 depending on the cathode materials and discharge external conditions. External magnetic field and a high arc current influence the charge state distribution in a similar way.
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