Abstract
It has been shown that oxygen atoms are selectively removed from metal oxides under ∼ 1 keV proton irradiation. The reduced metallic layer thickness reaches several tens of nanometers. The reduction of metal from oxide is accompanied by significant volume changes, the value of which has been experimentally determined and compared to theoretical estimates. It has been found that the metal reduction process can be carried out through an additional upper (relative to the proton beam) layer. It has been shown that the metal reduction rate does not change in the case of a thin (∼5 nm) upper layer; however, the coercive force of ferromagnetic metals increases strongly.
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