Solving the Mathematical Model of the Electrode Sheath in Symmetrically Driven RF Discharges

Abstract

A mathematical analysis is given for a self-consistent dynamic model for rf sheaths in the frequency range between the ion and electron plasma frequencies for arbitrary collision parameters and arbitrary rf sheath voltages. Based on this analysis, an algorithm is developed to solve the problem numerically in its full generality. Using the method that is developed, it is found that the rf conductivity current causes an asymmetrical behavior of the plasma-sheath interface and of the sheath characteristics, but has little effect on the rf discharge current/voltage characteristics.