Abstract
Abstract : The investigator was able to give a complete mathematical analysis for a self-consistent dynamic model for rf sheaths in the frequency range between the ion and electron plasma frequencies for arbitrary collision parameters arid arbitrary rf sheath voltages. Based on the above analysis, the investigator developed an algorithm which permits a complete numerical solution of the problem in its full generality without any restrictive assumptions. Using the developed algorithm, the investigator has computed the sheath characteristics for Argon and Helium. The computed results were compared with those found in known rf sheath theories and with those obtained experimentally at GTE Laboratories for a wide range of discharge conditions. It was found that our mathematical model matches the experiment better than any of the existing models. It is most complete and generalized model for the rf sheath in capacitive rf discharges.
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