Abstract
Solvent recycling in semiconductor manufacturing presents unique problems, in part because of the high purity standards that must be met. Even trace impurities in the recycled solvent can adversely affect product quality. Where implemented properly, benefits can include a return on capital investment in less than 6 months and a 90% reduction in virgin chemical purchases and waste shipments. Presented are details and benefits of two on-site distillation systems which the IBM Microelectronics Division semiconductor manufacturing facility in Essex Junction, Vermont has successfully used to recycle spent n-butyl acetate and N-methyl-2-pyrollidone for reuse.
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