Abstract
Compared to the conventional silicon-based technology, the solution process appears to be a revolution in the field of micro/nanofabrication due to its advantages of high efficiency in material and energy consumption and the use of low cost material. In this paper, we introduce a new approach to fabricate BioMEMS devices using this novel technology to make microcavity. Zirconium oxide patterns were formed on the silicon substrate simply by spin coating its precursor and thermal imprinting technique. We used poly-propylene carbonate (PPC) for the sacrificial material due to its unique pyrolysis property. The PPC was coated on the ZrO patterns and excess film was etched by oxygen plasma but retaining PPC structure between the lines of ZrO pattern. Then another ZrO layer was coated to encapsulate the PPC. The final microcavity structures were obtained by just baking the substrate by pyrolyzing the PPC. The obtained results show the approach’s prospect of becoming an ideal alternative for the current BioMEMS micro/nanofabrication technologies
Highlights
BioMEMS, which is a particular type of microelectronmechanical system (MEMS), has been proven to have great potential in improving human quality of life
In this paper we show the attempt to enhance the applicability of the solution process to be compatible with manufacturing the above-mentioned structure
This fact obtained from Atom force microscopy (AFM) implies that during imprinting, the ZrO gel almost fulfills the mould and the structure shape is maintained even after removal of the mould
Summary
BioMEMS, which is a particular type of microelectronmechanical system (MEMS), has been proven to have great potential in improving human quality of life. In a world where human demands in health and quality of life are increasing rapidly while resources are limited, the fact that BioMEMS has been developed based on silicon technology may constrain its future development and applications due to four main reasons. Current mainstream materials of BioMEMS researches are plastics and polymers, which have low cost and can be fabricated, the stability in dimensions and chemicals are not sufficient for some important applications. Another important aspect which need considering is the use of energy, since the conventional process consumes a lot of energy for facilities and working medium (e.g. maintenance of vacuum equipment, clean room etc). V N Luong et al originality is the choices of the metal oxide (ZrO) to form the cavity structure which has lower cost (compared to Si) and is more stable in dimension (compared to plastics, polymers), and poly propylene carbonate (PPC), a new material which can be imprinted, but is a perfect sacrificial material due to its clean pyrolysis property
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