Abstract
Thin film alloys of Pd and Ni make good sensors for hydrogen partial pressures over a very wide range: from . For from 1 to 700 Torr the atomic percent of Ni in the alloy has a strong effect on the change in film resistance which is used as the sensing property. The phase transition from the α‐ to the hydride β‐phase must be avoided to maintain a reversible sensor. The characteristics of alloys with Ni of 3, 5.3, 8, and 15% are reported. The phase transition was found in the 5.3% alloy at about 250 Torr, but alloys of showed no phase change behavior up to 630 Torr (pure) at ambient temperatures. Other characteristics of the Pd/Ni alloy sensors are also reported, including the effect of temperature, oxygen, and relative humidity, and the speed of response to step changes in .
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