Abstract
The high-energy ion nanoprobe LIPSION at the University of Leipzig has been operational since October 1998. The ultrastable single ended 3.5 MV SINLETRONTM accelerator supplies the H+ or He+ ion beam. A magnetic scanning system moves the focused beam across the sample. At present, a resolution of 150 nm in the low current mode and 300 nm at 5 pA could be achieved. The UHV grade experimental chamber is equipped with electron-, energy dispersive X-ray-, and particle detectors. They can be used simultaneously to analyse the sample by means of PIXE (particle induced X-ray emission), RBS (Rutherford backscattering) and in the case of thin samples STIM (scanning transmission ion microscopy). A goniometer allows the application of channeling measurements in single crystals in combination with these methods. The detection limits depend on the elements to be analysed and range from (1000⋯1) μg/g relative and (1⋯0.01) pg absolute. The analysis is nondestructive, but the sample has to be vacuum resistant. Applications of the nanoprobe in the field of semiconductor research, biomedicine, and archaeology will be described.
Published Version
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