Abstract
Solid Fabry-Perot etalons for X-rays have been constructed using sputter deposition techniques, each etalon consisting of two Layered Synthetic Microstructures (LSM) Bragg diffraction structures separated by a carbon spacer. The individual LS mirrors contain fifteen tungsten layers ( t w = 8.5 Å) separated by carbon layers ( t c = 19.1 Å. The thick carbon spacers act as resonant cavities; for the structures reported on here the spacer thicknesses, t sp, are 496.6 Å and 981 Å. The structures were characterized at grazing incidence in reflection using Cu Kα (λ = 1.5418 Å) radiation. The measured response of the etalons agrees well with calculation. Observed reflection efficiencies for Cu K α were approximately 50 percent of that calculated. This discrepancy is believed to be the result of the interfacial roughness (∼3.25 Å) between component layers and the sensitivity of the etalon response to the divergence of the incident X-ray beam.
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