Abstract
A SOI-based thermo-optic waveguide switch matrix worked at 1.55 /spl mu/m, integrated with spot size converters is designed and fabricated for the first time. The insertion loss and polarization dependent loss are less than 13 dB and 2 dB, respectively. The extinction ratio is larger than 19 dB. The response time is less than 5 /spl mu/s and the power consumption of the switch cell is about 200 mW.
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