Abstract
The growing demand for the solid-state meters for power and energy measurement leads to the fully integrated Hall-sensor-based microsystem solutions. In this paper, a silicon-on-insulator (SOI) Hall-sensor-based microsystem for energy measurements with dynamic offset cancellation was described. The Hall sensor is used to multiply the line voltage and the line current, giving an output voltage proportional to the instantaneous power. Furthermore, the voltage at the Hall output is proportional to the line active power and can be further processed. By converting the sensor output voltage to a digital signal using a delta-sigma <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(DeltaSigma)$</tex> modulator followed by a digital filtering, the energy consumption is observed at the end of the processing chain. The entire microsystem has been integrated in an experimental 0.5- <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$muhboxm$</tex> fully depleted SOI process and has a measured output error of less than <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$pm$</tex> 1.5%.
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