Abstract
A 16×16 thermo-optic waveguide switch matrix has been designed andfabricated on silicon-on-insulator wafer. For reducing devicelength, blocking switch matrix configuration is chosen. The buildingblock of the matrix is a 2×2 switch cell with a Mach–Zehnderinterferometer configuration, where a multi-mode interferometerserves as splitter/combiners. Spot size converters andisolating grooves are integrated on the same chip to reduce loss andpower consumption. Average power consumption of the switch cell is220 mW. The switching time of a switch cell is less than 3 μs.
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