Monolithic crossbar MEMS switch matrix

Abstract

This paper presents a novel approach to implement RF MEMS large size switch matrices. The concept is based on the implementation of a crossbar switch matrix and the introduction of unique switch cells that can be easily used to expand the matrix size. A six-mask fabrication process is adapted to fabricate the proposed four-port switch cell as well as the switch matrix samples. The switch cell has two operational states: thru and turn. This allows the cell to be easily integrated in the form of a crossbar switch matrix. Novel series contact cantilever beams have been used to implement the entire structure. The measured results for the entire switch cell show excellent insertion loss of 0.5dB, return loss of better than −20dB and isolation of −25dB for the thru path. The turn state of the switch shows a good performance of 0.4dB insertion loss, −18dB return loss and better than −25dB isolation for the frequency band of interest. A 3×3 switch matrix is implemented that shows 98% size reduction in comparison with the previously reported RF MEMS switch matrices.