Abstract
Instrumentation and current capabilities of soft X-ray (50–2000eV) spectromicroscopy are outlined with examples from recently published and some new work. Four common techniques are treated—transmission X-ray microscopy (TXM), scanning transmission X-ray microscopy (STXM), X-ray photoemission electron microscopy (XPEEM) and scanning photoemission microscopy (SPEM). I also present a fifth, emerging technique, that of soft X-ray spectro-ptychography which has significantly improved spatial resolution and provides new contrast mechanisms. Perspectives for near future (5–10 years) evolution of soft X-ray spectromicroscopy are outlined based on current trends and instrumentation under development.
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