Abstract
A new soft-x-ray multilayer monochromator with an improved resolution and a low specular background is presented. The principles of the device, based on the use of a lamellar multilayer amplitude grating (LMAG), are summarized. The techniques of fabrication of the monochromator (multilayer deposition, UV lithography and reactive ion etching) are given. The performance of this new monochromator at photon energies around 1500 eV is demonstrated. Copyright © 2001 John Wiley & Sons, Ltd.
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