Abstract
Surface and bulk properties' changes of a hydrogenated diamond-like carbon (H-DLC) film exposed to synchrotron radiation (SR) in the soft X-ray region were investigated by a nano-indenter, an atomic force microscope (AFM), and a combination of Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) techniques. The surface of H-DLC films became flat and the hydrogen content of H-DLC films decreased with increasing SR dose. On the other hand, Vickers hardness showed the complicated dependency on the SR dose. It was found that modification processes of H-DLC films by SR exposure included three reactions: flattening on the surface, hydrogen desorption, and etching by SR exposure. • Soft X-ray irradiation effect on the surface and material properties of highly hydrogenated diamond-like carbon thin films was investigated. • The hydrogen content of H-DLC films decreased from » 50% to » 20% by the SR exposure. • The Vickers hardness of the films increased from » 500 HV to » 1600 HV. • The surface roughness and P-V of the H-DLC films decreased at lower SR doses. • The modification processes of H-DLC films by SR exposure include three reactions: flattening on the surface, hydrogen desorption, and etching.
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