Abstract
High-density Fe cluster-assembled films were obtained at room temperature by an energetic cluster deposition. Fe clusters with an average cluster size of 12 nm were produced using our new plasma-gas-condensation-type cluster deposition apparatus. Ionized clusters in a cluster beam were accelerated electrically and directly deposited onto a substrate together with neutral clusters from the same cluster source. By increasing the impact energy of ionized clusters up to about 1 eV/atom, the obtained cluster assemblies have packing fractions higher than 0.8 without a marked size change, and reveal a soft magnetic behavior up to a frequency range of few hundred MHz and a high electrical resistivity.
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