Abstract
AbstractA series of CoFeB/MgO multilayers was fabricated by means of DC/RF magnetron sputtering. It is observed that the electromagnetic properties of the multilayers of CoFeB/MgO are closely related with the thickness of CoFeB sublayers, and the soft magnetic properties of discontinuous multilayers are affected by the cycle number of CoFeB/MgO bilayers. The optimized film of [Co64Fe24B12(0.7 nm)/MgO(0.4 nm)]50 exhibits a magnetic loss µ″ larger than 100 and µ′ larger than 80 between 0.9 and 2.1 GHz. The electrical resistivity ρ of this film is as high as 3.75 × 103 µΩ cm. The results indicate that this discontinuous CoFeB/MgO multilayer film has potential to serve as a noise suppressor or EMC materials in the GHz frequency range.
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