Abstract
Electronic cleanrooms have strict control requirements for SO2 concentration due its significant influence on product yield, and application of chemical filters is the main measure of SO2 control. In this study, 8 activated carbon (AC)-based chemical filters were collected and tested for their SO2 purification performance and resistance. These filters had very similar initial efficiencies (all >95 %) but large differences in 20 % breakthrough adsorption capacity (49–294 g at 9 ppm and 0.35 m/s). The adsorption capacity is found to be positively correlated with pleat density, which is a main structural parameter of pleated chemical filter. Meanwhile, the filter resistance (9.3–34 Pa at 0.35 m/s) demonstrates a decreasing and then increasing trend with increasing pleat density. This indicated the existence of an optimal range of pleat numbers that can be used to achieve a balance between resistance and adsorption capacity. A comprehensive performance evaluation index (Z′-index) is proposed for assessing the integrated resistant and adsorption capacity performance of chemical filters (19–210 g/W for 8 samples). A lumped parameter model was proposed for predicting the breakthrough curves at low concentration based on the traditional semi-empirical breakthrough models. The prediction deviation of the breakthrough curve at real cleanroom scenario (2 ppb) is less than 15 %. In addition, a rapid filter life prediction method based on filter design parameters is developed from the lumped parameter model. This work helps the understanding of the impact of filter structure parameters on performance and facilitate the development of high-performance chemical filters for SO2 contaminant control in electronic cleanrooms.
Published Version
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