SNMS method for the analysis of bulk oxide ceramics and thin films

Abstract

The problem of quick and precise quantitative chemical analysis of solids is extremely complex and still not solved in many cases despite a wide variety of developed methods. Even more difficult are the questions that rise when thin films are considered. As post-ionization takes place in a gaseous state, the structure and composition of a sample analyzed cannot influence the extent of the ionization. Sputtered neutrals mass-spectrometry (SNMS) technique may be applied to a wide variety of objects, not only to conductive but also to insolating ones. A very important application of SNMS is depth profile analysis that may be used for studying of thin films and thin-film structures. Quick and precise quantitative analysis is possible. High depth resolution allows study of distributions of elements and isotopes in thin films.