Abstract
Smoothing of an atomically rough vicinal surface of SrTiO 3 is studied by scanning tunneling microscope (STM) observation and by Monte Carlo (MC) simulation. A complex step pattern that resembles a two-dimensional phase separation pattern is observed on the surface. Analysis of the step pattern during annealing obtained by the STM in comparison with the MC simulation reveals an asymmetry of the relaxation pattern between islands and holes. The asymmetry is attributed to the difference of the mobility of an adatom and an atomic hole, and the asymmetry is enhanced by the step edge diffusion barrier. Values of an effective bond energy and an effective diffusion barrier as well as the surface diffusion coefficient are deduced from the relaxation pattern.
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