Abstract
The short wave infrared (SWIR) spectral band is an emerging domain thanks to its large potential. Close to VISible/Near Infrared wavelengths, SWIR images interpretation is made easier for the users. In this spectral region, new opportunities can be found in several fields of applications such as defense and security (night vision, active imaging), space (earth observation), transport (automotive safety), or industry (nondestructive process control, food and plastic sorting). In the frame of this paper, the development of a small pitch InGaAs technology for the SWIR band is described. The objective is to fuel an increase in focal plane arrays (FPA) resolution with the development of a10μm pitch process. A specific Read Out Integrated Circuit (ROIC) has been designed to address a high frame rate and various functions like the selection of lines or specific windowing. The ROIC exhibits 3 different gains. A full set of electro-optical characterizations for a VGA 10μm pitch focal plane array is presented.
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