Abstract
A microgripper of 2×3.9×0.1 mm 3 size is presented consisting of a single device microfabricated from a shape memory alloy (SMA) thin sheet. The device consists of two integrated actuation units of a stress-optimized shape, which actuate in opposite directions and thus form an antagonistic pair. The fabrication procedure is reduced to one micromachining step of a rolled SMA sheet and subsequent bonding onto a substrate. The maximum displacement of the gripping jaws is 180 μm, the maximum gripping force 17 mN. For an electrical power of 22 mW, a response time of 32 ms is observed.
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