Abstract
Abstract This paper reports on recent developments of gas microvalves, which are actuated by microfabricated shape memory alloy (SMA) thin films or sheets with stress-optimised shapes. TiNi, TiNiCu and TiNiPd thin films of 10 μm thickness have been fabricated by sputter deposition. TiNi sheets of 30–100 μm thickness have been made by hot-forging and cold-rolling. The main fabrication technologies of the valves have been laser cutting or electrolytic photoetching and subsequent hybrid integration. By variation of the chemical composition of the thin films, the valve operation temperature was adjusted between 30 and 120°C. The thin film devices have been operated in tension mode allowing the control of maximum pressure differences of 3000 hPa (3 bar). The corresponding maximum gas flow is about 360 Standard ccm. The maximum control power for TiNiCu and TiNi microvalves is 110 mW, for TiNiPd microvalves 220 mW. SMA sheet microdevices have been operated in bending mode, which allows large strokes and thus large gas flows.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.