Abstract
The computation of the diffraction of surface acoustic waves (SAWs) on piezoelectric materials is complicated by the anisotropy of their propagation, and requires their slowness curves to be known precisely. In addition, in actual devices these slowness curves are strongly affected by the massive electrodes used for SAW generation. We investigate the characteristics of SAWs propagating obliquely in periodic finite-thickness electrode gratings, with the mass-loading effect taken into account. The velocity of the surface waves, as well as the attenuation, piezoelectric coupling and beam steering are obtained as a function of the propagation angle with respect to the grating axis. The slowness curves for SAWs propagating under periodic electrode gratings are compared with the slowness curves for the same SAWs propagating under a thick homogeneous metallic layer. Numerical examples are presented for the SAWs of 42.75°YX quartz and X112.2°Y lithium tantalate, and the leaky SAWs of 36°YX lithium tantalate.
Published Version
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